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Two methods for evaluating particle contribution are provided
SEMI E82-0304 (technical revision)
• Equipment recipe execution as it directly affects process modules
SEMI M73 — Test Method for Extracting Relevant Characteristics from Measured Wafer Edge Profiles
The components in this Document include:
F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System Revision:SEMI F70-0320 - Current Two methods for evaluating particleNOTICE: The designation of SEMI F70 was updated during the 0320 publishing cycle to reflect the creation of SEMI F70. 1. The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers,